Measuring high aspect ratio and composite micro-trenches without damage is critical for advanced microfabrication, yet ...

Surface metrology has to increasingly deal with the presence of sub-micron thick films, which are now being used on products well beyond semiconductor devices. Sub-micron films may be incidental – for ...

Optical measurement techniques collecting light intensity in the far-field such as conventional and confocal microscopy or coherence scanning interferometry (CSI) enable fast and contactless ...

Topography becomes more important in quality assurance for manufacturing. This regards the characterization of macro-sized to medium optics and the optimization of a manufacturing process using a ...

Matter-wave interferometry can be used to probe the foundations of physics and to enable precise measurements of particle properties and fundamental constants. It relies on beam splitters that ...

This experimental setup – based on coherence scanning interferometry – was developed at INRiM. Fiber sensing systems integrate photonic and optoelectronic components that are matched with fiber optics ...

Accurately controlling film thickness and uniformity is extremely important for both throughput and performance in the automotive, aerospace, semiconductor, medical, and research industries. White ...

A technique called plasmonic interferometry helps to detect spatial coherence in 'incoherent' light. A technique called plasmonic interferometry helps to detect spatial coherence in 'incoherent' light ...