Photolithography without a mask: Multilayer lithography with the Maskless Aligner MLA 150
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YouTubeHeidelberg Instruments
Photolithography without a mask: Multilayer lithography with the Maskless Aligner MLA 150
The Maskless Aligner MLA 150 takes you into the future of photolithography: You no longer need a photomask to create a pattern, instead simply expose your design directly onto your coated wafer. Any change in your pattern can be easily accommodated: In contrast to the use of a Mask Aligner, in this case there is no need to fabricate or order a ...
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